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[High-precision 3D morphology measurement by digital gatling method based on structured light].

Gang-Yin Luo¹, Yu-Guo Tang, Pei-Yu Qiao

¹Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. luogy1237@sina.com

Guang Pu Xue Yu Guang Pu Fen Xi = Guang Pu

|December 18, 2012

Summary

This study introduces a high-precision 3D texture measurement system using structured light. The digital gatling system achieves 2.75 micrometer resolution and sub-micrometer accuracy for microscopic 3D morphology analysis.

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Area of Science:

Optics and Photonics
Metrology and Measurement Science

Context:

Accurate measurement of microscopic 3D morphology is crucial for various scientific and industrial applications.
Existing methods often face limitations in precision, speed, or non-contact capabilities.

Purpose:

To design and validate a novel 3D texture measurement system based on structured light for high-precision microscopic 3D morphology analysis.
To achieve high accuracy and resolution in 3D height information calculation using an analytic phase method.

Summary:

A digital gatling structured light system was developed, employing a four-step equal step method for phase image acquisition.
Advanced preprocessing techniques, including adaptive Wiener filtering and wavelet multi-thresholding, were used to mitigate noise and distortions.
A gradient-oriented, multifrequency phase unwrapping algorithm ensured stable and continuous phase calculation, achieving 2.75 micrometer resolution and sub-micrometer accuracy.

Impact:

The developed system offers a non-contact, fast, and simple solution for high-precision microscopic 3D morphology measurements.
Demonstrates potential for applications requiring detailed surface topography analysis, such as materials science, microelectronics, and biotechnology.