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Updated: May 15, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis
J Jansen1, M T Otten, H W Zandbergen
1National Centre for HREM, Kavli Institute of Nano Science, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands. j.jansen@tudelft.nl
Abstract:
A method is presented to use an electron microscope in transmission mode to determine the mis-tilt from a zone axis of a crystalline material. The method involves recording a number of additional diffraction patterns with incident beams tilted over 2 to 3 degrees. It is shown that an accuracy of 0.02 degree can be achieved, which is far better than that of the specimen-stage tilt axes, which is about 0.1 degree for the β-tilt.
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