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Updated: May 15, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Digital holographic interferometry with CO2 lasers and diffuse illumination applied to large space reflector
Marc P Georges1, Jean-François Vandenrijt, Cédric Thizy
1Centre Spatial de Liège, Université de Liège, Avenue du Pré Aily, Angleur (Liège) B-4031, Belgium. mgeorges@ulg.ac.be
Abstract:
Digital holographic interferometry in the long-wave infrared domain has been developed by combining a CO(2) laser and a microbolometer array. The long wavelength allows large deformation measurements, which are of interest in the case of large space reflectors undergoing thermal changes when in orbit. We review holography at such wavelengths and present some specific aspects related to this spectral range on our measurements. For the design of our digital holographic interferometer, we studied the possibility of illuminating specular objects by a reflective diffuser. We discuss the development of the interferometer and the results obtained on a representative space reflector, first in the laboratory and then during vacuum cryogenic test.

