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Polymerization inhibition by triplet state absorption for nanoscale lithography

Benjamin Harke1, William Dallari, Giulia Grancini

  • 1Department of Nanophysics, Istituto Italiano di Tecnologia-IIT, Via Morego 30, 16163 Genova, Italy. benjamin.harke@iit.it

Advanced Materials (Deerfield Beach, Fla.)
|January 11, 2013
PubMed
Summary

No abstract available in PubMed .

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