Variable electron beam diameter achieved by a titanium oxide/carbon nanotube hetero-structure suitable for...

Area of Science:

• Materials Science
• Nanotechnology
• Electronics Engineering

Background:

• Carbon nanotubes (CNTs) are promising field emitters due to their unique electrical and mechanical properties.
• Field emission devices are crucial for applications in displays, X-ray sources, and microfabrication.

Purpose of the Study:

• To fabricate a novel field emission device using titanium oxide (TiO(2)) encapsulated carbon nanotubes (CNTs).
• To investigate the potential of this device for nanolithography and the fabrication of field-effect transistors.

Main Methods:

• Vertically aligned CNTs were grown on silicon substrates via plasma-enhanced chemical vapor deposition (PECVD).
• CNTs were encapsulated with TiO(2) using atmospheric pressure chemical vapor deposition (APCVD).
• Field emission was achieved through mechanical polishing, and device performance was characterized electrically.

Main Results:

• The fabricated TiO(2)/CNT structure demonstrated field emission capabilities.
• A variable electron beam spot size of less than 30 nm was achieved by controlling the TiO(2) gate voltage.
• Electrical measurements confirmed the device's suitability for fabricating field-emission-based field-effect transistors.

Conclusions:

• The developed TiO(2)/CNT field emission device shows significant potential for high-resolution nanolithography.
• The gate control mechanism allows for precise modulation of the emission current, essential for transistor fabrication.
• This technology offers a pathway for advanced micro- and nanofabrication techniques.