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Updated: May 15, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Conductive AFM for CNT characterization
Marius Toader1, Holger Fiedler, Sascha Hermann
1Solid Surfaces Analysis Group, Institute of Physics, Chemnitz University of Technology, Chemnitz 09107, Germany. marius.toader@physik.tu-chemnitz.de.
Abstract:
We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.

