Updated: May 14, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
Katsuhiko Ariga1, Qingmin Ji, Taizo Mori
1World Premier International (WPI) Research Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan. ARIGA.Katsuhiko@nims.go.jp
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