Updated: May 14, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Tingyin Ning1, Outi Hyvärinen, Henna Pietarinen
1Department of Physics, Tampere University of Technology, P. O. Box 692, FI-33101 Tampere, Finland.
Silicon nitride films exhibit strong UV third-harmonic generation, significantly outperforming fused silica. Resonant waveguide gratings further boost this nonlinear optical effect, expanding CMOS-compatible material applications.
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