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Horizontally patterned Si nanowire growth for nanomechanical devices
M Fernandez-Regulez1, M Sansa, M Serra-Garcia
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, F-08193 Bellaterra, Spain.
Nanotechnology
|February 14, 2013
Summary
We developed a new method for growing silicon nanowires on vertical surfaces, enabling precise positioning for nanomechanical devices. This technique allows for the creation of nanowire resonators with measurable mechanical resonances for advanced sensing applications.
Area of Science:
- Materials Science and Engineering
- Nanotechnology
- Mechanical Engineering
Background:
- Silicon nanowires (SiNWs) possess unique mechanical and electrical properties ideal for nanomechanical devices.
- Precise control over SiNW growth and positioning is crucial for fabricating functional nanomechanical systems.
- Existing methods often lack the precision required for complex device architectures like resonators.
Purpose of the Study:
- To present a novel method for patterned horizontal vapor-liquid-solid growth of SiNWs at vertical sidewalls.
- To enable the fabrication of precisely positioned single SiNWs and ordered SiNW arrays.
- To demonstrate the utility of this method for creating SiNW-based nanomechanical resonators and sensors.
Main Methods:
- Utilized a vapor-liquid-solid (VLS) growth technique adapted for vertical sidewall patterning.
- Developed methods for controlling the growth position and density of SiNWs.
- Fabricated doubly clamped SiNW resonators and resonator arrays for mechanical characterization.
Main Results:
- Successfully patterned horizontal SiNW growth on vertical Si microstructure sidewalls.
- Demonstrated the fabrication of both individual SiNW resonators and ordered arrays.
- Achieved optical and electrical readout of mechanical resonances, including VHF range resonant mode splitting.
Conclusions:
- The developed method provides precise control over SiNW growth for nanomechanical device fabrication.
- SiNW resonators fabricated using this technique exhibit measurable mechanical resonances.
- The ability to read out resonant mode splitting opens possibilities for enhanced nanomechanical sensing.
