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A dual lateral-field-excited bulk acoustic wave sensor array.

Shane Winters1, George Bernhardt, John F Vetelino

  • 1Laboratory for Surface Science and Technology, University of Maine, Orono, ME, USA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|March 12, 2013
PubMed
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This study introduces a novel lateral-field-excited (LFE) sensor array for enhanced detection. LFE sensors offer a bare sensing surface, enabling simultaneous measurement of electrical and mechanical property changes with minimal interference.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Traditional quartz crystal microbalances (QCMs) face limitations in sensor array fabrication due to surface electrodes and wiring.
  • QCMs are unable to detect changes in electrical properties, hindering their application in certain sensing scenarios.
  • A novel sensor design is needed to overcome these limitations for advanced sensor arrays.

Purpose of the Study:

  • To fabricate and test two independent lateral-field-excited (LFE) sensor elements on a single substrate.
  • To demonstrate the feasibility of LFE sensors for creating compact and versatile sensor arrays.
  • To evaluate the sensing capabilities of LFE devices for both electrical and mechanical property changes.

Main Methods:

  • Fabrication of two distinct lateral-field-excited (LFE) sensor elements integrated onto a single substrate.

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  • Utilizing a back-side electrode configuration, preserving a bare sensing surface on each LFE element.
  • Testing the response of individual LFE elements to various stimuli to assess sensing capabilities and crosstalk.

    • Main Results:

    • Successful fabrication of two independent LFE sensor elements on a shared substrate.
    • Demonstrated that individual LFE elements respond to both electrical and mechanical property variations.
    • Observed minimal crosstalk between the two independent LFE sensor elements, indicating good signal isolation.

    Conclusions:

    • Lateral-field-excited (LFE) sensors offer a promising alternative to QCMs for sensor array applications.
    • The LFE sensor's design facilitates integration and enables the detection of diverse property changes.
    • This work validates the potential of LFE sensor arrays for multi-modal sensing with high performance.