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Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control.

Trevor K Chan1, Mischa Megens, Byung-Wook Yoo

  • 1Department of Mechanical and Aerospace Engineering, University of California, Davis, One Shields Ave., Davis, California 95616, USA. trechan@ucdavis.edu

Optics Express
|March 14, 2013
PubMed
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We developed a fast optical beamsteering system using an 8x8 MEMS phased array. It achieves high mirror phase accuracy (<π/100) for precise beam control and demonstrates feedforward methods to reduce mirror ringing.

Area of Science:

  • Optics and Photonics
  • Micro-Electro-Mechanical Systems (MEMS)
  • Control Systems Engineering

Background:

  • Optical beamsteering is crucial for applications like free-space optical communication and LiDAR.
  • Existing MEMS phased arrays face challenges in achieving high phase accuracy and mitigating dynamic errors.
  • Real-time phase measurement and closed-loop control are essential for precise beam manipulation.

Purpose of the Study:

  • To present a high-speed optical beamsteering system utilizing an 8x8 MEMS phased array.
  • To demonstrate real-time, in situ phase measurement for dynamic mirror control.
  • To validate the system's accuracy and explore methods for improving performance, such as reducing micromirror ringing.

Main Methods:

  • An 8x8 MEMS phased array was employed for optical beamsteering.

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  • An in situ interferometer was integrated for real-time phase measurement of individual mirrors.
  • A closed-loop phase-control algorithm was implemented to achieve high mirror phase accuracy.
  • Stroboscopic measurement techniques were utilized to analyze dynamic behaviors.

    • Main Results:

    • The closed-loop control achieved a mirror phase accuracy of less than π/100.
    • Successful far-field optical beam steering was demonstrated.
    • Stroboscopic measurements enabled the demonstration of feedforward control to eliminate micromirror ringing.

    Conclusions:

    • The developed system offers high-speed, accurate optical beamsteering capabilities.
    • The in situ interferometer and closed-loop control are effective for precise MEMS mirror phase management.
    • Feedforward control shows promise in addressing dynamic artifacts like micromirror ringing for enhanced beamsteering stability.