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Related Experiment Video

Updated: May 13, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

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Published on: February 4, 2018

Optical Fourier transform based in-plane vibration characterization for MEMS comb structure.

Yongfeng Gao1, Liangcai Cao, Zheng You

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China.

Optics Express
|March 14, 2013
PubMed
Summary

This study introduces an efficient optical Fourier transform method for characterizing Micro-Electro-Mechanical-System (MEMS) vibrations. This technique offers a convenient, high-efficiency, and low-cost solution for on-line and on-wafer MEMS testing.

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Last Updated: May 13, 2026

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Optics

Background:

  • Efficient characterization of Micro-Electro-Mechanical-System (MEMS) mechanical properties is crucial for mass production.
  • Current methods face challenges in on-line and on-wafer testing efficiency.

Purpose of the Study:

  • To present a novel in-plane vibration characterization method for MEMS using optical Fourier transform (OFT).
  • To enable convenient, efficient, and low-cost on-line and on-wafer MEMS characterization.

Main Methods:

  • Utilized optical Fourier transform (OFT) to analyze MEMS comb structures.
  • Captured intensity distribution at the focal plane to measure vibrator displacement.
  • Employed a spatial light modulator (SLM) for calibration by imitating MEMS movement.

Main Results:

  • Successfully verified the OFT method on a typical MEMS comb.
  • Achieved relative standard deviations (RSD) better than 5% for displacement measurements.
  • Demonstrated the feasibility of the method for practical MEMS characterization.

Conclusions:

  • The presented OFT method is a viable solution for on-line and on-wafer MEMS characterization.
  • The technique offers significant advantages in convenience, efficiency, and cost.
  • This method supports the future mass production needs of the MEMS foundry.