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Updated: May 12, 2026

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
In situ broadband cryogenic calibration for two-port superconducting microwave resonators
1Electrical and Computer Engineering Department, University of Maryland, College Park, Maryland 20742-3285, USA. davidyeh@umd.edu
Abstract:
We introduce an improved microwave calibration method for use in a cryogenic environment, based on a traditional three-standard calibration, the Thru-Reflect-Line (TRL) calibration. The modified calibration method takes advantage of additional information from multiple measurements of an ensemble of realizations of a superconducting resonator, as a new pseudo-Open standard, to correct errors in the TRL calibration. We also demonstrate an experimental realization of this in situ broadband cryogenic calibration system utilizing cryogenic switches. All calibration measurements are done in the same thermal cycle as the measurement of the resonator (requiring only an additional 20 min), thus avoiding 4 additional thermal cycles for traditional TRL calibration (which would require an additional 12 days). The experimental measurements on a wave-chaotic microwave billiard verify that the new method significantly improves the measured scattering matrix of a high-quality-factor superconducting resonator.

