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Updated: May 12, 2026

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Electrochemical Roughening of Thin-Film Platinum Macro and Microelectrodes
Published on: June 30, 2019
Ultra-thin platinum catalytic electrodes fabricated by atomic layer deposition
Jihwan An1, Young-Beom Kim, Fritz B Prinz
1Department of Mechanical Engineering, Stanford University, Stanford, CA 94305, USA.
Physical Chemistry Chemical Physics : PCCP
|April 13, 2013
Summary
Ultra-thin platinum (Pt) layers fabricated by atomic layer deposition (ALD) significantly reduce catalyst loading in low-temperature fuel cells. This cost-effective method achieves performance comparable to thicker sputtered platinum electrodes.
Area of Science:
- Materials Science
- Electrochemistry
- Catalysis
Background:
- Noble metal catalysts, particularly platinum (Pt), are essential components in low-temperature fuel cells but contribute significantly to overall costs.
- Reducing the loading of these expensive noble metals is crucial for making fuel cell technology more economically viable.
Purpose of the Study:
- To investigate the efficacy of ultra-thin platinum (Pt) cathode catalyst layers fabricated by atomic layer deposition (ALD) for low-temperature solid oxide fuel cells.
- To determine the optimal Pt loading and thickness using ALD for high-performance fuel cell electrodes.
Main Methods:
- Fabrication of ultra-thin platinum (Pt) catalyst layers (approximately 10 nm) using atomic layer deposition (ALD).
- Testing of the ALD Pt layers as cathode electrodes in low-temperature solid oxide fuel cells.
- Characterization using Transmission Electron Microscopy (TEM) to analyze morphology and triple-phase boundary (TPB) density.
Main Results:
- A 10 nm thick ALD Pt layer, corresponding to a Pt loading of only 0.02 mg cm⁻², was sufficient for a functional catalytic cathode.
- The performance of the ALD Pt cathode was comparable to that of a much thicker (80 nm) sputtered Pt cathode.
- TEM analysis confirmed that the optimized ALD cycles resulted in contiguous Pt films with high triple-phase boundary (TPB) density.
Conclusions:
- Atomic layer deposition (ALD) enables significant reduction in platinum (Pt) loading for fuel cell cathodes, thereby lowering costs.
- The developed ALD Pt fabrication method is suitable for high-performance fuel cells, including those with complex three-dimensional structures.

