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Published on: July 18, 2015
Polarization insensitive silicon immersion grating based on total internal reflection
Yuichi Higuchi1, Yuzo Ishii, Koichi Hadama
1NTT Microsystem Integration Labs., NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa, 243-0198, Japan. higuchi.yuichi@lab.ntt.co.jp
Optics Express
|April 24, 2013
Summary
Researchers developed a novel silicon immersion grating (IG) with low polarization-dependent loss (PDL) and high diffraction efficiency. This optical component is crucial for advanced photonic applications requiring precise light manipulation.
Area of Science:
- Photonics and Optical Engineering
- Materials Science for Optics
Background:
- Polarization-dependent loss (PDL) and diffraction efficiency are critical parameters for optical components.
- Immersion gratings (IGs) are widely used in spectroscopy and other optical systems.
- Achieving low PDL and high diffraction efficiency simultaneously in IGs presents a significant engineering challenge.
Purpose of the Study:
- To design and analyze a novel immersion grating (IG) with minimized polarization-dependent loss (PDL) and maximized diffraction efficiency.
- To investigate the impact of dielectric film properties on IG performance.
- To optimize the IG design for high dispersion power.
Main Methods:
- Fabrication of an IG using a silicon (Si) prism and a Si grating coated with a dielectric film.
- Analysis of the effect of the dielectric film's refractive index on diffraction efficiency for both TM and TE polarizations.
- Simulation of IG performance, focusing on PDL and diffraction efficiency.
- Experimental validation using a prototype IG.
Main Results:
- Simulated optimized IG achieved a PDL of 0.2 dB and diffraction efficiency of -0.4 dB.
- The developed dielectric film allowed for tuning TM polarization diffraction efficiency without affecting TE polarization efficiency.
- A prototype IG demonstrated a low PDL of 0.6 dB and maintained a high diffraction efficiency of -0.4 dB.
- The prototype exhibited high dispersion power.
Conclusions:
- The proposed dielectric-coated silicon immersion grating effectively achieves low PDL and high diffraction efficiency.
- The design approach allows for independent control of diffraction efficiency for different polarizations.
- This technology holds promise for advanced optical systems demanding high performance and precision.

