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Updated: May 12, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Qiang Zhou1, Wenzheng Yang, Fengtao He
1State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, CAS, Xi’an 710119, Shaanxi China.
This study introduces a new ultrafast laser technique for precise material structuring using dynamic spatial phase engineering. The method enables the creation of various periodic microstructures on metallic alloys with programmable periods.
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