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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques
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Raster scan waveform compensation control for enhancing the orthogonality of images in SEM

Seung Jae Kim1, Wonjong Joo, Dong Hwan Kim

  • 1Korea Electronics-Machinery Convergence Technology Institute, Seoul, South Korea.

Microscopy (Oxford, England)
|April 30, 2013
PubMed

Keywords:
orthogonalityraster scanscan coilscan linescan skewscanning electron microscope

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