Updated: May 10, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Byung-Wook Yoo1, Mischa Megens, Trevor Chan
1School of Electrical Engineering and Computer Sciences, University of California Berkeley, Berkeley, CA 94720, USA. yoo@eecs.berkeley.edu
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We developed a fast, high-power optical phased array using a silicon high-index-contrast subwavelength grating (HCG). This microelectromechanical system (MEMS) device enables precise beamforming and beamsteering for various optical applications.
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