Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: May 10, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering.

Byung-Wook Yoo1, Mischa Megens, Trevor Chan

  • 1School of Electrical Engineering and Computer Sciences, University of California Berkeley, Berkeley, CA 94720, USA. yoo@eecs.berkeley.edu

Optics Express
|June 6, 2013
PubMed
Summary

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Oral Lysozyme Attenuates Neuroinflammation and Brain Injury After Traumatic Brain Injury Through Gut Microbiota-Dependent Reprogramming of Tryptophan Metabolism.

CNS neuroscience & therapeutics·2026
Same author

Clinical Prognostic Modeling and Paired Blood-CSF Metabolomic Profiling for Outcome Prediction in Isolated Moderate-to-Severe Traumatic Brain Injury: Implications for Neurocritical Care Management.

Journal of clinical medicine·2026
Same author

Unrolled Richardson-Lucy deconvolution network with partially connected layers in computational microscopy.

Optics express·2026
Same author

Lithium-Germanium Alloy Interfaces for Efficient Low-Pressure Ammonia Synthesis.

Angewandte Chemie (International ed. in English)·2026
Same author

Translating dietary standards into healthy meals with few-ingredient substitutions.

PLOS digital health·2026
Same author

Behavioural nudges to reduce low-value care for low back pain in the emergency department (NUDG-ED): a 2 × 2 factorial, pragmatic cluster randomized trial.

CMAJ : Canadian Medical Association journal = journal de l'Association medicale canadienne·2026

We developed a fast, high-power optical phased array using a silicon high-index-contrast subwavelength grating (HCG). This microelectromechanical system (MEMS) device enables precise beamforming and beamsteering for various optical applications.

Area of Science:

  • Photonics and Nanotechnology
  • Microelectromechanical Systems (MEMS)

Background:

  • Optical phased arrays are crucial for beamforming and beamsteering.
  • Existing MEMS optical phased arrays face limitations in speed and optical power handling.

Purpose of the Study:

  • To develop a novel MEMS optical phased array with enhanced speed and optical power capabilities.
  • To incorporate a high-index-contrast subwavelength grating (HCG) for improved performance.

Main Methods:

  • Fabrication of a single-layer, thin HCG using silicon.
  • Integration of the HCG into a MEMS optical phased array architecture.
  • Characterization of the device's beamforming and beamsteering range and resonant frequency.

Main Results:

More Related Videos

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

Related Experiment Videos

Last Updated: May 10, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

  • Achieved beamforming and beamsteering in a range of ± 1.26° × 1.26°.
  • Demonstrated suitability for high optical power applications due to the silicon HCG.
  • Measured a resonant frequency of 0.32 MHz for the HCG, indicating high-speed operation.

Conclusions:

  • The developed MEMS optical phased array with an HCG offers a promising solution for high-speed, high-power beamforming.
  • The use of a thin, single-layer silicon HCG significantly improves device speed and power handling.
  • This technology has potential applications in optical communication, sensing, and imaging systems.