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Related Experiment Video

Updated: May 10, 2026

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Published on: July 18, 2015

Highly efficient color filter array using resonant Si3N4 gratings.

Mohammad Jalal Uddin¹, Robert Magnusson

¹Department of Electrical Engineering, University of Texas at Arlington, Box 19016, Arlington, Texas 76019, USA.

|June 6, 2013

Summary

This summary is machine-generated.

We developed a highly efficient guided-mode resonant color filter array using silicon nitride and UV-laser lithography. This novel device achieves high color purity and efficiency for blue, green, and red light, surpassing previous benchmarks.

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Last Updated: May 10, 2026

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Area of Science:

Photonics and Optical Engineering
Nanotechnology
Materials Science

Background:

Guided-mode resonance (GMR) offers a pathway to efficient and compact optical filters.
Subwavelength gratings are crucial components in advanced photonic devices.
Achieving high efficiency and narrow bandwidth in resonant color filters remains a challenge.

Purpose of the Study:

To design and fabricate a highly efficient guided-mode resonant color filter array.
To demonstrate precise control over color filtering using subwavelength gratings.
To achieve superior performance metrics compared to existing color filter technologies.

Main Methods:

Numerical design utilizing rigorous coupled-wave analysis (RCWA).
Fabrication via UV-laser interferometric lithography.
Characterization of optical response for blue, green, and red wavelengths.

Main Results:

Demonstrated a silicon nitride grating (60 nm) and waveguide (105 nm) structure on glass.
Achieved distinct blue, green, and red color filtering with grating periods of 274, 327, and 369 nm.
Obtained high efficiencies (94-99%) and narrow spectral bandwidths (~12 nm) for the filters.

Conclusions:

The fabricated GMR color filter array exhibits excellent performance characteristics.
The demonstrated efficiencies exceed previously reported values in the literature.
This technology holds promise for advanced display and imaging applications.