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Updated: May 10, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
07:17

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

Published on: August 1, 2017

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature

Young-Cheol Kim1, Sung-Ho Jang, Se-Jin Oh

  • 1Department of Nanoscale Semiconductor Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea.

The Review of Scientific Instruments
|June 8, 2013
PubMed

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