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Multi-interferometric displacement measurement system with variable measurement mirrors.

Chung-Ping Chang1, Pi-Cheng Tung, Lih-Horng Shyu

  • 1Department of Mechanical Engineering, National Central University, Taoyuan, Taiwan.

Applied Optics
|June 14, 2013
PubMed
Summary
This summary is machine-generated.

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This study introduces a versatile laser interferometer system for precision mechanical applications. The adaptable design allows quick switching between planar mirrors and corner cube reflectors for accurate displacement sensing and calibration.

Area of Science:

  • Metrology
  • Optical Engineering
  • Precision Mechanics

Background:

  • Laser interferometers are crucial for high-precision displacement sensing and calibration in industry.
  • Existing modified Fabry-Perot interferometers utilize either planar mirrors or corner cube prisms, each with specific performance characteristics.
  • The need for adaptable measurement solutions in precision engineering is growing.

Purpose of the Study:

  • To propose and investigate a novel multi-interferometric displacement system.
  • To enable rapid and convenient switching between planar mirror and corner cube reflector measurement heads.
  • To analyze the system's performance, including interpolation error and displacement measurement accuracy.

Main Methods:

  • Development of a multi-interferometric system with interchangeable measurement mirrors (planar and corner cube).

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  • Experimental evaluation of interpolation errors associated with each reflector type.
  • Calibration and verification of linear displacement measurements over a 300 mm range.

    • Main Results:

    • Demonstration of experimental results and analyses for both planar mirror and corner cube reflector configurations.
    • Quantification of interpolation errors and displacement measurement accuracy for the developed system.
    • The system achieved a maximum standard deviation below 0.2081 μm over a 300 mm measurement range.

    Conclusions:

    • The developed multi-interferometric system offers a compact and robust solution for linear displacement sensing and calibration.
    • Provides guidance on selecting appropriate reflectors and interpolation models based on measurement demands.
    • The system's adaptability and accuracy make it suitable for demanding precision mechanical applications.