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Updated: May 10, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Guided immobilisation of single gold nanoparticles by chemical electron beam lithography
Patrick A Schaal1, Ulrich Simon
1Institute of Inorganic Chemistry and JARA - Fundamentals of Future Information Technology, RWTH Aachen University, Landoltweg 1, D-52056 Aachen, Germany.
Abstract:
The fabrication of periodic arrays of single metal nanoparticles is of great current interest. In this paper we present a straight-forward three-step procedure based on chemical electron beam lithography, which is capable of producing such arrays with gold nanoparticles (AuNPs). Preformed 6 nm AuNPs are immobilised on thiol patterns with a pitch of 100 nm by guided self-assembly. Afterwards, these arrays are characterised by using atomic force microscopy.

