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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Rendering dark modes bright by using asymmetric split ring resonators.
Y Jeyaram1, N Verellen, X Zheng
1Institute for Nanoscale Physics and Chemistry, INPAC, KU Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium. YogeshSharma.Jeyaram@fys.kuleuven.be
Optics Express
|July 12, 2013
Summary
Introducing asymmetry in metallic Split Ring Resonators excites higher-order modes. Asymmetric resonators exhibit significantly higher quality factors for even modes compared to odd modes.
Area of Science:
- Metamaterials and Nanophotonics
- Electromagnetics and Optics
Background:
- Split Ring Resonators (SRRs) are fundamental building blocks in metamaterial research.
- Symmetric SRRs typically support limited resonant modes under normal incidence.
- Controlling and enhancing resonant modes is crucial for advanced optical applications.
Purpose of the Study:
- To investigate the impact of structural asymmetry on the resonant modes of planar metallic Split Ring Resonators.
- To explore the excitation of higher-order resonant modes (even and odd) in asymmetric SRRs.
- To experimentally compare the quality factors of different resonant modes in asymmetric structures.
Main Methods:
- Theoretical modeling of symmetric and asymmetric Split Ring Resonators.
- Experimental fabrication and characterization of metallic SRRs.
- Analysis of electromagnetic response and resonant mode excitation.
Main Results:
- Structural asymmetry enables the excitation of previously inaccessible higher-order modes (l=2, 3, 5).
- Both even and odd higher-order modes are observed in asymmetric SRRs.
- Experimentally, even mode resonances in asymmetric resonators show a 5.8 times higher quality factor than higher-order odd resonances.
Conclusions:
- Asymmetric Split Ring Resonators offer enhanced control over electromagnetic response.
- The ability to excite and sustain higher-order modes with high quality factors opens new avenues for metamaterial design.
- This study provides a pathway for developing novel optical devices with tailored resonant properties.
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