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Morphological studies of SnO2 thin films fabricated by using e-beam method.

S N Heo1, C H Sung, Y J Seo

  • 1School of Nano and Advanced Materials Engineering, Changwon National University, 641-773 Changwon, Korea.

Journal of Nanoscience and Nanotechnology
|July 18, 2013
PubMed
Summary

Tin(IV) oxide (SnO2) nanosheet thin films were fabricated using electron beam evaporation. Optimal conditions yielded crystalline SnO2 nanosheets, with morphology influenced by substrate temperature and oxygen pressure.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Thin Film Deposition

Background:

  • Tin(IV) oxide (SnO2) is a semiconductor with diverse applications.
  • Controlling the morphology of SnO2 nanostructures is crucial for optimizing their properties.
  • Electron beam evaporation is a versatile technique for thin film deposition.

Purpose of the Study:

  • To investigate the influence of substrate temperature, oxygen partial pressure, and film thickness on SnO2 nanostructure morphology.
  • To optimize electron beam evaporation conditions for producing crystalline SnO2 nanosheets.
  • To understand the growth mechanism of SnO2 nanosheets.

Main Methods:

  • Deposition of SnO2 thin films using electron beam evaporation on quartz substrates.
  • Variation of substrate temperatures (RT to 300°C) and oxygen partial pressures (0-200 sccm).

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  • Characterization using X-ray diffraction (XRD), Field Emission Scanning Electron Microscopy (FE-SEM), and Energy Dispersive Spectroscopy (EDS).

    • Main Results:

    • Amorphous SnO2 films at RT and 100°C; crystalline films with rutile structure at 200°C and 300°C.
    • Increased crystallinity with higher oxygen partial pressure.
    • Sheet-like morphology (40 nm thickness, 1 µm lateral dimension) observed at 200°C and 300°C, with size increasing with temperature and oxygen pressure.

    Conclusions:

    • Substrate temperature and oxygen partial pressure significantly control SnO2 thin film morphology and crystallinity.
    • Crystalline SnO2 nanosheets can be effectively produced via optimized electron beam evaporation.
    • The findings provide insights into the growth mechanism of SnO2 nanosheets for potential applications.