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Backscattered electron imaging at low emerging angles: a physical approach to contrast in LVSEM

J Cazaux1, N Kuwano, K Sato

  • 1LISM; EA 4695 Faculty of Sciences, BP 1039, 51687 Reims Cedex 2, France.

Ultramicroscopy
|July 23, 2013
PubMed

Keywords:
Backscattered electronsLow Voltage Scanning Electron MicroscopySurface propertiesWork function effects

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