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Updated: May 9, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Spatially multiplexed X-Y lateral shear interferometer with varying shears using holographic lens and spatial Fourier
Charles Joenathan1, Ashley Bernal, Rajpal S Sirohi
1Department of Physics and Optical Engineering, Rose-Hulman Institute of Technology, Terre Haute, Indiana 47803, USA. Charles.joenathan@rose-hulman.edu
Abstract:
Current methods in shear interferometry provide shear only along one direction at a time. We propose a method in which interferograms with shear along the x, y, and xy directions can be obtained simultaneously from a single exposure recording via the concept of spatial multiplexing. The method utilizes holographic lenses, which have been recorded on a single plate with their optical centers translated along the x and y directions. The phase information is extracted through the Fourier transform method. In addition, this technique also provides a method to obtain interferograms with shear in multiples of the original shear along the x and y axis in one single frame capture due to the nonlinearity inherent in the phase holographic lens.

