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Related Experiment Video

Updated: May 8, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

High Q SiC microresonators.

Jaime Cardenas1, Mian Zhang, Christopher T Phare

  • 1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA.

Optics Express
|August 14, 2013
PubMed
Summary
This summary is machine-generated.

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We developed new silicon carbide (SiC) photonic devices on silicon substrates. These devices achieve high optical confinement, demonstrating potential for advanced integrated photonics applications.

Area of Science:

  • Materials Science
  • Photonics
  • Electrical Engineering

Background:

  • Silicon carbide (SiC) is a promising material for photonic devices due to its unique optical and electronic properties.
  • Integrating SiC with silicon photonics platforms is challenging but offers significant advantages.
  • Existing fabrication methods for SiC-on-silicon devices often face limitations in optical confinement.

Purpose of the Study:

  • To demonstrate novel photonic devices utilizing epitaxially grown 3C silicon carbide (SiC) on silicon.
  • To achieve high optical confinement in SiC-based photonic structures.
  • To fabricate and characterize a suspended microring resonator for integrated photonics.

Main Methods:

  • Epitaxial growth of standard 3C SiC on silicon substrates.

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Last Updated: May 8, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
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Published on: July 2, 2012

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  • Device fabrication involving undercutting the silicon substrate to enhance optical confinement.
  • Characterization of a 20 μm radius suspended microring resonator.

    • Main Results:

    • Successful fabrication of photonic devices using SiC-on-silicon.
    • Demonstration of high optical confinement by leveraging SiC stiffness and substrate removal.
    • Achieved a quality factor (Q) of 14,100 for a 20 μm radius suspended microring resonator.

    Conclusions:

    • The developed SiC-on-silicon platform enables high-performance photonic devices.
    • Suspended microring resonators show excellent optical properties for integrated photonic circuits.
    • This technology is compatible with commercially available SiC-on-silicon substrates, paving the way for scalable applications.