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Phase extraction from interferograms with unknown tilt phase shifts based on a regularized optical flow method.

Fa Zeng1, Qiaofeng Tan, Huarong Gu

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.

Optics Express
|August 14, 2013
PubMed
Summary
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This study introduces a new method for extracting phase distribution from interferograms, accurately estimating unknown tilt phase shifts for improved optical measurements. The technique enhances phase extraction accuracy for complex optical elements.

Area of Science:

  • Optical Metrology
  • Interferometry
  • Diffractive Optics

Background:

  • Phase-shifted interferometry is crucial for optical metrology.
  • Extracting phase from interferograms with unknown tilt phase shifts presents significant challenges.
  • Existing methods often have limitations regarding tilt amounts, orientations, and fringe types.

Purpose of the Study:

  • To develop a novel method for accurate phase distribution extraction from phase-shifted interferograms.
  • To address the challenge of unknown and potentially large tilt phase shifts.
  • To improve the robustness and applicability of phase extraction techniques in optical testing.

Main Methods:

  • Extending the regularized optical flow method with spatial image processing and frequency estimation.

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  • Accurate estimation of tilt phase shifts between temporal phase-shifted interferograms.
  • Utilizing the least-squares method for phase component extraction after tilt shift estimation.

    • Main Results:

    • The proposed method accurately estimates tilt phase shifts, even large ones (up to 6.18λ).
    • Phase extraction results show good agreement with established software (Zygo's MetroPro).
    • The method demonstrates robustness with various fringe types (open/closed) and tilt conditions.

    Conclusions:

    • The novel method effectively extracts phase distribution from interferograms with unknown tilt phase shifts.
    • It offers greater flexibility and fewer restrictions compared to previous phase extraction techniques.
    • This advancement has significant implications for precise optical testing and characterization of optical elements.