Scanning Electron Microscopy
Overview of Microscopy Techniques
Preparation of Samples for Electron Microscopy
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Updated: May 8, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Phillip Gopon1, John Fournelle, Peter E Sobol
1Department of Geoscience, University of Wisconsin, Madison, WI 53706, USA.
Analyzing small iron-silicon compounds requires advanced electron-probe microanalysis techniques. This study explores alternative X-ray lines for precise analysis of sub-micron samples, overcoming limitations of conventional methods.
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