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Assessing the precision of strain measurements using electron backscatter diffraction--part 1: detector assessment
T B Britton1, J Jiang, R Clough
1Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, United Kingdom.
Ultramicroscopy
|September 11, 2013
Summary
Increasing exposure time and using high bit depth images significantly improves strain resolution in high resolution electron backscatter diffraction (HR-EBSD) measurements. This advancement enhances the precision of elastic strain and lattice rotation analysis.
Area of Science:
- Materials Science
- Crystallography
- Electron Microscopy
Background:
- High resolution electron backscatter diffraction (HR-EBSD) is crucial for analyzing microstructural properties.
- Accurate measurement of elastic strain and lattice rotation is vital for understanding material behavior.
- Previous studies have explored factors influencing HR-EBSD precision, but optimizing strain resolution remains an active area of research.
Purpose of the Study:
- To investigate the relationship between pattern shift measurement precision and the resolution of elastic strain and lattice rotation.
- To determine the key factors that enhance sensitivity and strain resolution in HR-EBSD.
- To establish the theoretical limits of strain measurement accuracy using cross-correlation techniques.
Main Methods:
- Analysis of high-quality experimental diffraction patterns from single-crystal silicon.
- High-fidelity dynamical simulations employing Bloch wave theory.
- Quantitative measurement of the detector Modulation Transfer Function (MTF).
- Development and application of a numerical model for strain analysis.
Main Results:
- Increased exposure time, particularly with 1x1 binning, significantly enhances measurement sensitivity.
- Software integration and high bit depth images lead to a substantial improvement in strain resolution.
- Simulated diffraction patterns indicate a theoretical strain resolution as low as 4.2×10⁻⁷ with a 1000×1000 pixel image and 0.001 pixel shift precision.
Conclusions:
- Optimizing exposure time and image processing techniques are critical for maximizing strain resolution in HR-EBSD.
- The study demonstrates the potential for highly precise strain and lattice rotation measurements using advanced HR-EBSD methodologies.
- These findings pave the way for more accurate characterization of materials at the nanoscale.
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