Covariant description of X-ray diffraction from anisotropically relaxed epitaxial structures

A Zhylik1, A Benediktovitch, I Feranchuk

  • 1Belarusian State University, Minsk, Belarus.

Journal of Applied Crystallography
|September 19, 2013
PubMed
Summary

A new theoretical framework describes epitaxial layers with different cell parameters and relaxation anisotropy. This method accurately evaluates relaxation parameters using diffraction data, validated on ZnO on sapphire films.

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