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Updated: Aug 7, 2026
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Synchrotron X-ray Microdiffraction and Fluorescence Imaging of Mineral and Rock Samples
Published on: June 19, 2018
Microsecond X-ray reflectometry
Michael Haberl1, Maximilian Eder1, Erwin Pfeiler1
1Physikalische Chemie, Graz University, Heinrichstraße 28, Graz, Steiermark 8010, Austria.
Journal of Applied Crystallography
|August 6, 2026
Summary
We developed ultrafast X-ray reflectometry (XRR) achieving microsecond acquisition times for thin film analysis. This method enhances kinetic studies of material processes with improved fitting robustness.
Area of Science:
- Materials Science
- Physics
- Analytical Chemistry
Background:
- Synchrotron X-ray reflectometry (XRR) is crucial for thin film characterization.
- Traditional XRR methods have limitations in temporal resolution for dynamic processes.
Purpose of the Study:
- To significantly accelerate X-ray reflectometry (XRR) data acquisition.
- To enable time-resolved studies of rapid kinetic processes in thin films.
Main Methods:
- Rapidly sweeping incidence angle with a galvanometer and using an area detector.
- Implementing an Anscombe variance-stabilizing transform for low-count Poisson statistics.
- Preserving monochromatic parallel-beam geometry for quantitative analysis.
Main Results:
- Achieved XRR data acquisition in 213 microseconds over a wide qz range.
- Demonstrated quantitative agreement with standard XRR for thickness, density, and roughness.
- Showed improved fitting robustness using the Anscombe transform for low photon counts.
Conclusions:
- Ultrafast XRR enables microsecond-timescale characterization of thin films.
- The developed method and fitting technique are applicable to various reflectometry studies.
- This advance facilitates real-time monitoring of thin-film growth and dynamic phenomena.
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