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Related Experiment Video

Updated: May 7, 2026

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
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Time-resolved surface infrared spectroscopy during atomic layer deposition.

Brent A Sperling1, John Hoang, William A Kimes

  • 1Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.

Applied Spectroscopy
|September 27, 2013
PubMed
Summary

This study introduces a new method for real-time surface infrared spectroscopy during atomic layer deposition (ALD). The technique uses a rapid-scan Fourier transform infrared (FT-IR) spectrometer and a buried metal layer (BML) substrate for enhanced surface analysis.

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Area of Science:

  • Materials Science
  • Spectroscopy
  • Surface Chemistry

Background:

  • Atomic Layer Deposition (ALD) is crucial for thin-film fabrication.
  • Real-time surface analysis during ALD is challenging.
  • Existing methods lack sufficient time resolution for dynamic studies.

Purpose of the Study:

  • To develop a sub-second time-resolution surface infrared spectroscopy method for ALD.
  • To investigate the dynamic processes occurring during an average ALD cycle.
  • To optimize experimental parameters for surface species analysis.

Main Methods:

  • Utilized a rapid-scan Fourier transform infrared (FT-IR) spectrometer for fast spectral acquisition.
  • Employed a buried metal layer (BML) substrate to enhance surface species absorption and enable surface-specific analysis.
  • Synchronized interferogram acquisition (120 ms) over multiple ALD cycles.
  • Performed simulations to understand reflectivity changes and BML enhancement decay.

Main Results:

  • Achieved sub-second time resolution for surface infrared spectra during ALD.
  • Successfully differentiated surface species from gas-phase or window-adsorbed species using BML substrates.
  • Identified origins of increased reflectivity due to phonon absorption in oxide layers.
  • Quantified the decay of BML enhancement as oxide layers grow.

Conclusions:

  • The developed method provides unprecedented temporal resolution for in-situ ALD surface studies.
  • BML substrates are effective for enhancing surface sensitivity and enabling surface-specific infrared spectroscopy.
  • Simulations aid in interpreting spectral data and optimizing experimental conditions for ALD process control.