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Related Concept Videos

NMR Spectrometers: Resolution and Error Correction01:14

NMR Spectrometers: Resolution and Error Correction

When magnetic nuclei in a sample achieve resonance and undergo relaxation, the signal detected in NMR is an approximately exponential free induction decay. Fourier transform of an exponential decay yields a Lorentzian peak in the frequency domain. Lorentzian peaks in an NMR spectrum are defined by their amplitude, full width at half maximum, and position, where the peak width is governed by the spin-spin relaxation time alone. In real experiments, however, the applied magnetic field is rendered...
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Controlled Synthesis and Fluorescence Tracking of Highly Uniform Poly(N-isopropylacrylamide) Microgels
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Published on: September 8, 2016

Improved measurement accuracy in optical scatterometry using correction-based library search.

Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang

    Applied Optics
    |October 3, 2013
    PubMed
    Summary
    This summary is machine-generated.

    A new correction-based library search method enhances optical scatterometry accuracy. This technique refines measurements by estimating and correcting errors, offering a practical solution for inverse problems.

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    Area of Science:

    • Optical scatterometry
    • Metrology
    • Inverse problems

    Background:

    • Library search is a common method for solving inverse problems in optical scatterometry.
    • Conventional methods' accuracy depends on library grid intervals, increasing computational cost with finer grids.

    Purpose of the Study:

    • To propose a correction-based library search method for improved measurement accuracy in optical scatterometry.
    • To address the limitations of conventional library search regarding accuracy and computational cost.

    Main Methods:

    • Derivation of a formulation to estimate the error between expected and searched solutions.
    • Application of the estimated error as a correction term to refine the searched solution.
    • Experimental validation on a photoresist grating sample.

    Main Results:

    • The correction-based method significantly improves measurement accuracy compared to conventional library search.
    • Negligible computational penalty was observed for the correction-based method.
    • Higher accuracy and lower time cost were achieved compared to interpolation-based methods.

    Conclusions:

    • The proposed correction-based library search method offers a practical advancement for solving inverse problems in optical scatterometry.
    • This method enhances measurement precision without substantial computational overhead.
    • It presents a viable alternative to existing library search techniques.