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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Published on: February 27, 2013

An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions

P Salou1, H Lebius, A Benyagoub

  • 1CIMAP (CEA-CNRS-ENSICAEN-UCBN), Boulevard Henri Becquerel, BP 5133, 14070 Caen Cedex 5, France.

The Review of Scientific Instruments
|October 5, 2013
PubMed

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