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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Nanometrology

David J S Birch1, Philip Yip

  • 1The Photophysics Research Group, Department of Physics, Centre for Molecular Nanometrology, SUPA, University of Strathclyde, Glasgow, Scotland, UK.

Methods in Molecular Biology (Clifton, N.J.)
|October 11, 2013
PubMed

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