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Updated: May 7, 2026
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Fabrication of all-carbon nanotube electronic devices on flexible substrates through CVD and transfer methods
Yuan Zou1, Qunqing Li, Junku Liu
1Department of Physics, Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing, 100084, PRC.
Abstract:
SWNT thin films with different nanotube densities are fabricated by CVD while controlling the concentration of catalyst and growth time. Three layers of SWNT films are transferred to flexible substrates serving as electrodes and channel materials, respectively. All-carbon nanotube TFTs with an on/off ratio as high as 10(5) are obtained. Inverters are fabricated on top of the flexible substrates with symmetric input/output behavior.
