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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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Remote driven and read MEMS sensors for harsh environments.

Aaron J Knobloch1, Faisal R Ahmad, Dan W Sexton

  • 1General Electric Global Research, One Research Circle, Niskayuna, NY 12309, USA. knobloch@research.ge.com.

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This study presents a novel method for remotely interrogating resonant sensors using acoustic excitation and electromagnetic coupling. This technique enables high-accuracy MEMS devices to operate in harsh, high-temperature environments without co-located electronics.

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Area of Science:

  • Sensor Technology
  • Micro-Electro-Mechanical Systems (MEMS)
  • Acoustic and Electromagnetic Physics

Background:

  • High-accuracy sensors are limited in harsh environments by the temperature sensitivity of control electronics.
  • Existing remote interrogation methods for resonant sensors have limitations for extreme conditions.

Purpose of the Study:

  • To demonstrate a novel method for remote interrogation of resonant sensors.
  • To enable the use of high-accuracy sensors in harsh, high-temperature environments.
  • To overcome the limitations of co-located electronics in extreme conditions.

Main Methods:

  • Acoustically driving a silicon comb drive resonator into resonance.
  • Electromagnetically coupling to the resonator to read its resonant frequency.
  • Implementing a feedback architecture for broadband noise-driven resonance.

Main Results:

  • Successfully excited and read a silicon resonator from a standoff distance of 22 cm with 30 mW drive power.
  • Achieved resonance using broadband noise with a feedback architecture at a 15 cm standoff distance.
  • Demonstrated wireless operation without requiring junction-based electronics near the sensor.

Conclusions:

  • This work enables silicon-based, high-accuracy MEMS devices for high-temperature wireless applications.
  • The developed remote interrogation technique overcomes critical temperature constraints for sensor electronics.
  • Acoustic-to-electromagnetic conversion for resonant sensor readout is a viable approach for harsh environments.