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Acoustic backing in 3-D integration of CMUT with front-end electronics.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2012
Same author

CMUT array modeling through free acoustic CMUT modes and analysis of the fluid CMUT interface through Fourier transform methods.

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Updated: May 6, 2026

An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
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Grooved backing structure for CMUTs.

Kamal Raj Chapagain, Arne Rønnekleiv

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    |October 26, 2013
    PubMed
    Summary

    Capacitive micromachined ultrasonic transducers (CMUTs) require acoustic backings to prevent ringing. Grooved backings offer a thinner solution for space-limited applications like intravascular ultrasound (IVUS) by scattering acoustic waves.

    Area of Science:

    • Acoustics
    • Materials Science
    • Biomedical Engineering

    Background:

    • Capacitive micromachined ultrasonic transducers (CMUTs) on silicon require acoustic backings to suppress substrate ringing.
    • Traditional epoxy-tungsten composite backings are effective but can be too thick for some applications.
    • Intravascular ultrasound (IVUS) necessitates compact transducer designs.

    Purpose of the Study:

    • To investigate acoustic signal transmission in CMUTs with different backing structures.
    • To evaluate the performance of grooved backing structures for CMUTs.
    • To analyze wave propagation and surface wave generation in silicon substrates.

    Main Methods:

    • Experimental investigation of acoustic signal transmission.
    • Characterization of grooved backing structures.

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  • Analysis of wave propagation at normal and oblique angles.

    • Main Results:

    • Grooved backings provide sufficient attenuation for thinner designs by scattering acoustic waves.
    • Scattering reduces specular reflection, improving image quality.
    • Surface wave generation in silicon substrates due to acoustic velocity mismatches was studied.

    Conclusions:

    • Grooved backing structures are a viable alternative for space-constrained CMUT applications.
    • The scattering effect of grooves enhances acoustic energy absorption.
    • Controlling surface wave generation is crucial for optimal CMUT performance in fluidic environments.