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Updated: May 6, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Liquid Tunable Microlenses based on MEMS techniques.

Xuefeng Zeng¹, Hongrui Jiang

¹Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706 USA ; Globalfoundries US Inc., 400 Stone Break Extension, Malta, NY 12020.

Journal of Physics D: Applied Physics

|October 29, 2013

Summary

This summary is machine-generated.

Tunable liquid microlenses, utilizing microelectromechanical systems (MEMS), offer adjustable focal lengths for miniaturized optical systems. This review covers their physics, MEMS integration, and categories including mechanical, electrical, and microfluidic designs.

Keywords:

MEMS Microelectromechanical systems micro optics microlenses tunable lenses

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Area of Science:

Optics and Photonics
Microtechnology
Materials Science

Background:

Microlens technology is advancing rapidly, enabling miniaturized optical systems with diverse applications.
Tunable-focus microlenses are particularly significant, allowing focal length adjustment via integrated micro-actuators.
Microelectromechanical systems (MEMS) are crucial for realizing these tunable microlenses.

Purpose of the Study:

To review recent advancements in tunable liquid microlenses.
To discuss the fundamental physics governing tunable liquid microlenses.
To categorize and describe different types of MEMS-based tunable microlenses.

Main Methods:

Discussion of underlying physical principles of tunable liquid microlenses.
Categorization based on actuation mechanisms: mechanical, electrical, and microfluidic integration.
Review of microelectromechanical systems (MEMS) techniques employed in their fabrication and operation.

Main Results:

Identified three primary categories of tunable liquid microlenses based on MEMS technology.
Detailed the operational principles and fabrication approaches for each category.
Highlighted the potential of these microlenses in various miniaturized optical applications.

Conclusions:

Tunable liquid microlenses represent a key development in miniaturized optics.
MEMS technology is pivotal for achieving tunable focal lengths in microlenses.
Further research in mechanical, electrical, and microfluidic tunable microlenses promises expanded applications.