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Quantitative thermal microscopy using thermoelectric probe in passive mode.

A Bontempi1, L Thiery, D Teyssieux

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Summary
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This study presents a passive scanning thermal microscope for quantitative surface temperature measurements of microsystems. The technique offers a wide temperature range and high resolution, overcoming limitations of conventional methods.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Physics

Background:

  • Accurate surface temperature measurement is crucial for microsystem characterization.
  • Conventional thermal imaging techniques face limitations in resolution and operating conditions.

Purpose of the Study:

  • To introduce a quantitative scanning thermal microscope (STM) for microsystem analysis.
  • To demonstrate the capability of STM in measuring surface temperature distributions under challenging conditions.

Main Methods:

  • Utilizing a passive mode scanning thermal microscope equipped with a micronic thermocouple probe.
  • Implementing a calibration procedure to account for probe-to-sample thermal interaction.

Main Results:

  • Demonstrated quantitative surface temperature mapping of microsystems.
  • Achieved measurements under conditions unsuitable for other techniques.
  • Showcased insensitivity to surface optical properties and imaging of DC/AC temperature components up to 1 kHz.

Conclusions:

  • The developed STM is a versatile tool for quantitative thermal analysis of microsystems.
  • The technique offers significant advantages in temperature range, resolution, and operational flexibility.