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A two-axis in-plane motion measurement system based on optical beam deflection.

R Sriramshankar1, R Sri Muthu Mrinalini, G R Jayanth

  • 1Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India.

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This study introduces an optical beam deflection system for precise in-plane motion measurement in macro- and micro-scale stages. The high-resolution system enables real-time control and identification of motion dynamics.

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Area of Science:

  • Measurement Science
  • Nanotechnology
  • Optical Engineering

Background:

  • Accurate measurement of in-plane motion is crucial for advanced motion control systems.
  • Existing methods often lack the required resolution, bandwidth, or sensitivity for complex dynamics.
  • High-resolution motion stage characterization is essential for model identification and real-time feedback control.

Purpose of the Study:

  • To present a novel optical beam deflection system for high-resolution, large-bandwidth in-plane motion measurement.
  • To demonstrate the system's applicability to both macro- and micro-scale motion stages.
  • To utilize the measurement capability for identifying and compensating motion stage nonlinearities.

Main Methods:

  • An optical beam deflection system utilizing a curved reflector integrated with the motion stage.
  • Theoretical analysis to predict sub-angstrom resolution and >1 kHz bandwidth.
  • Experimental validation using a piezo flexure stage with spherical reflectors and a scanning probe microcantilever with a polydimethylsiloxane micro-reflector.

Main Results:

  • Theoretical sub-angstrom resolution and >1 kHz bandwidth with negligible cross-axis sensitivity.
  • Experimental agreement with theoretical values within 8.3% for macro-scale motion.
  • Successful identification of nonlinearities and transient dynamics in a piezo-stage using micro-scale motion measurement.

Conclusions:

  • The optical beam deflection system offers a viable solution for high-fidelity in-plane motion measurement.
  • The technique enables precise characterization and subsequent feedback control of motion stages.
  • This approach advances the capabilities for modeling and controlling complex dynamic systems.