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Acquisition and quantification of ion images with a camera-based detection system and classical quantification

F Michiels1, W Vanhoolst, P Van Espen

  • 1Department of Chemistry, University of Antwerp (U.I.A.), Universiteitsplein 1, B-2610, Wihijk, Belgium.

Journal of the American Society for Mass Spectrometry
|November 20, 2013
PubMed
Summary

This study details a camera-based detection system for secondary ion microscopy, enabling quantitative analysis of ion images. The methods were validated using steel and aluminum reference materials for accurate elemental composition.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Microscopy

Background:

  • Secondary ion mass spectrometry (SIMS) is crucial for elemental analysis.
  • Quantitative analysis in SIMS can be challenging due to complex matrix effects and detector limitations.

Purpose of the Study:

  • To investigate the quantitative analytical characteristics of a camera-based detection system for SIMS.
  • To evaluate methods for quantifying ion images with large dynamic ranges.

Main Methods:

  • Utilized a camera-based detection system for secondary ion microscopy.
  • Acquired ion images through multiple exposures to achieve large dynamic ranges.
  • Applied the sensitivity factor method and the matrix ion species ratio method for quantification.

Main Results:

  • The camera-based system demonstrated quantitative analytical capabilities.
  • Successful quantification of ion images was achieved using the described methods.
  • Analysis of steel and aluminum standard reference materials validated the system's performance.

Conclusions:

  • The camera-based detection system is suitable for quantitative analysis in SIMS.
  • The employed quantification methods are effective for analyzing complex materials like steel and aluminum.