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Updated: May 5, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
1Centre for High Energy Physics, University of the Punjab, Lahore 45590, Pakistan.
We optimized an electron gun using electrostatic focusing, achieving a 0.5 mm beam diameter and 68.9 kW/cm² power density. This simpler, more powerful design surpasses previous results.
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