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Updated: May 5, 2026

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics
Published on: August 27, 2013
Impedance matched channel walls in acoustofluidic systems
Ivo Leibacher1, Sebastian Schatzer, Jürg Dual
1Institute of Mechanical Systems (IMES), Department of Mechanical and Process Engineering, Swiss Federal Institute of Technology (ETH Zurich), Tannenstrasse 3, CH-8092 Zurich, Switzerland. leibacher@imes.mavt.ethz.ch.
This study introduces polydimethylsiloxane (PDMS) walls in bulk acoustic wave (BAW) devices, enhancing acoustophoresis by decoupling acoustic and fluidic boundaries. This innovation allows flexible particle manipulation for biotechnological applications.
Area of Science:
- Microfluidics
- Acoustic manipulation
- Biotechnology
Background:
- Bulk acoustic wave (BAW) devices commonly use silicon walls for both acoustic and fluidic boundaries in microfluidic channels.
- Conventional BAW devices have limitations in particle manipulation due to restricted acoustic fields.
Purpose of the Study:
- To introduce polydimethylsiloxane (PDMS) walls in BAW devices to decouple acoustic and fluidic boundaries.
- To enhance the flexibility and possibilities of acoustophoresis through improved acoustic field control.
- To demonstrate microparticle concentration using the novel device design.
Main Methods:
- Fabrication of BAW devices incorporating PDMS layers within microchannels.
- Acoustic impedance matching between silicon and PDMS to decouple boundaries.
- Experimental validation of particle manipulation and accumulation lines.
- Development of an analytical model for device performance.
Main Results:
- Successfully decoupled acoustic and fluidic boundaries using PDMS.
- Achieved arbitrary placement of particle accumulation lines within the fluidic domain.
- Demonstrated effective microparticle concentration.
- Analytical model showed good agreement with experimental results.
Conclusions:
- The integration of PDMS walls in BAW devices significantly enhances acoustophoresis capabilities.
- This approach offers greater control over particle manipulation for microfluidic applications.
- The technology holds potential for advanced biotechnological applications including particle separation, sensing, and cell handling.
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