Calibration of a snapshot phase-resolved polarization-sensitive spectral reflectometer

This Letter describes a universal calibration theory by which conventional interferometry can be extended to vibration robust snapshot polarization-sensitive spectral reflectometry without any complicated optical components or active devices. Experiments for verifying the proposed calibration theory have been conducted by using a Michelson-interferometer-based normal incidence spectroellipsometric system, and also some key system design considerations for object 3D pose tolerant measurement capability have been drawn. The proposed solution enables us to extract the spectroscopic ellipsometric parameter Δ(k) of an anisotropic object within 10 ms with high accuracy.