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Updated: May 4, 2026

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Large arrays and properties of 3-terminal graphene nanoelectromechanical switches
Xinghui Liu1, Ji Won Suk, Narasimha G Boddeti
1Department of Mechanical Engineering, University of Colorado, Boulder, CO, 80309, USA.
Abstract:
Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.
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