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Beamline BL-07 at Indus-2: a facility for microfabrication research
V P Dhamgaye1, G S Lodha1, B Gowri Sankar1
1Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus-2, Indore, MP 452012, India.
Journal of Synchrotron Radiation
|December 25, 2013
Summary
The Indus-2 X-ray lithography beamline is operational, offering tunable X-ray energies for fabricating microstructures. It enables precise fabrication of complex structures using advanced X-ray techniques.
Area of Science:
- Materials Science
- Physics
- Engineering
Background:
- The Indus-2 synchrotron facility now features an operational X-ray lithography beamline.
- This beamline provides versatile X-ray energy tuning capabilities for advanced fabrication.
Purpose of the Study:
- To detail the features and performance of the new X-ray lithography beamline.
- To demonstrate the beamline's capability in fabricating microstructures.
Main Methods:
- The beamline operates in two modes: with X-ray mirrors for tunable energy (1-20 keV) and a controlled spectral bandwidth, or in a 'no optics' mode for hard X-rays up to 40 keV.
- Fabrication of microstructures was achieved using stencil masks (stainless steel and polyimide-gold) with X-ray lithography.
Main Results:
- The X-ray lithography beamline on Indus-2 is now operational and offers flexible energy spectrum control.
- Successful fabrication of honeycomb structures in PMMA and a compound refractive X-ray lens in SU-8 was demonstrated.
Conclusions:
- The operational X-ray lithography beamline on Indus-2 is a valuable tool for microfabrication.
- The beamline's performance and versatility allow for the creation of complex microscale devices and structures.
