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Updated: May 4, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Multipoint vibrometry with dynamic and static holograms
1Institut für Technische Optik, Stuttgart Research Center of Photonic Engineering (SCOPE), University of Stuttgart, D-70569 Stuttgart, Germany.
Abstract:
We report on two multipoint vibrometers with user-adjustable position of the measurement spots. Both systems are using holograms for beam deflection. The measurement is based on heterodyne interferometry with a frequency difference of 5 MHz between reference and object beam. One of the systems uses programmable positioning of the spots in the object volume but is limited concerning the light efficiency. The other system is based on static holograms in combination with mechanical adjustment of the measurement spots and does not have such a general efficiency restriction. Design considerations are given and we show measurement results for both systems. In addition, we analyze the sensitivity of the systems which is a major limitation compared to single point scanning systems.

