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Updated: May 4, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Institut für Technische Optik, Stuttgart Research Center of Photonic Engineering (SCOPE), University of Stuttgart, D-70569 Stuttgart, Germany.
We developed two holographic multipoint vibrometers for adjustable measurements. One system offers programmable spot positioning but lower light efficiency, while the other uses static holograms for better efficiency.
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