Ellipsometry with polarisation analysis at cryogenic temperatures inside a vacuum chamber

S Bauer1, B Grees1, D Spitzer1

  • 1Institut für Kernphysik, Westfälische Wilhelms-Universität Münster, D-48149 Münster, Germany.

Summary

This study introduces a novel null ellipsometry technique for measuring cryogenic thin films. The method accurately determines optical properties and thicknesses of thin films at low temperatures.